Silicon Carbide Sintering Furn

Silicon Carbide sintering furnace

Product Introduction
CX-SCSF series are top loading batch type induction heating furnaces with the maximum operating temperature of 2400°C. These furnaces operate with rough vacuum, partial pressure and micro-positive pressure of protective gases such as Argon and Nitrogen. Oxygen atmosphere is prohibited in these furnaces due to graphite crucible and graphite insulation used inside the furnace.
CX-SCSF series use medium frequency induction heating method, however the resistance heating method is optional in case of client demand. A water cooled induction coil installed inside the furnace. At the center of the coil, there is a graphite crucible as the susceptor for induction current, surrounded by carbon felt as the insulation material. Cylindrical hot zone design ensure uniform heating inside the hot zone.
Application
These furnaces are suited for silicon carbide sintering, ceramic matrix composite sintering, transparent optical ceramic sintering, C/C composites sintering and carbonization.
General Features
• Vertical top loading or horizontal front loading with single chamber. The shell and door are water-cooled jacketed. The outer layer of the furnace shell is made of carbon steel while the inner layer is made of SS304 stainless steel. The inner stainless steel wall features long time uses without rusting as well as less adsorption of induction eddy currents in comparison to plain carbon steel.
• Induction coil covered by high quality alumina mortar in order to avoid short circuit between coil and carbon felt.
• High vacuum pneumatic valves equipped with position indicator in order to automatic control of the vacuum and gas supply system.
• Gas flow control system.
• Over-temperature, over-pressure, water lack and power failure alarms and automatic mechanical interlock for over-pressure protection.
• High precision smart temperature controller which can store 20 programs with total 400 segments.
• Sliding thermocouple for low temperature measurement and pyrometer for high temperature measurement, features high precision temperature control from room temperature (RT) to 2400°C.
High temperatures are generally measured using pyrometers and each kind of pyrometer has a limited measuring range, for example 350-2500°C. Therefore, when the furnace start heating from RT, there will be an undefined heating process out of pyrometer measuring range. In some cases, batches are sensitive and require to have a defined heating curve from RT. In these cases, using the Sliding Thermocouple for low temperature stage of heating cycle, and pyrometer for high temperature cycle is very useful. Thermocouple measure temperature from RT to a defined high temperature point. After reaching that point, thermocouple automatically slide out of the hot zone and pyrometer measure temperature. During cooling, after furnace cooled down to that defined temperature, thermocouple automatically return inside the hot zone and regulate temperature down to RT.
• High capability MF contactor for furnace operation switch.
• Fully automatic PLC monitoring system.
• Remote operation, failure diagnosis and software upgrading.
Optional Features
• High Vacuum System
• Gas Purification System
• Closed Loop Cooling Water System
• Distributed Control System (DCS)
• Double chambers (with only one control cabinet for two chambers)
• Resistance heating instead of induction heating
 
Technical Details of Vertical Top Loading Models
Model CX-SCSF300V CX-SCSF800V CX-SCSF1200V CX-SCSF1500V CX-SCSF1600V CX-SCSF2000V
Max Working Temperature 2400°C
Usable Space (mm) W×H×L Φ200×300 Φ400×800 Φ500×1200 Φ600×1500 Φ600×1600 Φ600×2000
Max. Loading Capacity(L) 9 100 235 452 452 565
Temperature Uniformity
(ΔT between 1000°C and 2400°C)
±10°C
Max. Heat-up Rate (CEDRT)* 15°C/min
Heating Power 70 KW 120 KW 200 KW 260 KW 300 KW 500 KW
Frequency 4000 Hz 2500 Hz 1500 Hz 1000 Hz 1000 Hz 900 Hz
Control Method Thyristor or IGBT Control (customer-specified)
Ultimate Vacuum (CEDRT)* 0.2 mbar
Optional High Vacuum (CEDRT)* 5×10-5 mbar
Pressure Rise 0.01 mbar/hr
Working Atmosphere High Vacuum (Optional) / Vacuum / Inert Gas (Ar or N2)
Quenching Gas Pressure 1.5 bar (Absolute Pressure)
Supply Voltage 3P, 380V, 50Hz/60Hz
Cooling Water Pressure 1~2 bar
Cooling Water Temperature ≤28 °C
 

 * CEDRT: Clean, Empty, Dry, Room Temperature Furnace


Technical Details of Horizontal Front Loading Models
Model CX-SCSF300H CX-SCSF400H CX-SCSF500H CX-SCSF600H CX-SCSF700H CX-SCSF900H
Max Working Temperature 2400°C
Usable Space (mm) W×H×L 300×300×600 400×400×800 500×500×1200 600×600×1500 700×700×1600 900×900×2000
Max. Loading Capacity(L) 54 128 300 540 784 1620
Temperature Uniformity
(ΔT between 1000°C and 2400°C)
±10°C
Max. Heat-up Rate (CEDRT)* 15°C/min
Heating Power 70 KW 120 KW 200 KW 260 KW 300 KW 500 KW
Frequency 4000 Hz 2500 Hz 1500 Hz 1000 Hz 1000 Hz 900 Hz
Control Method Thyristor or IGBT Control (customer-specified)
Ultimate Vacuum (CEDRT)* 0.2 mbar
Optional High Vacuum (CEDRT)* 5×10-5 mbar
Pressure Rise 0.01 mbar/hr
Working Atmosphere High Vacuum (Optional) / Vacuum / Inert Gas (Ar or N2)
Quenching Gas Pressure 1.5 bar (Absolute Pressure)
Supply Voltage 3P, 380V, 50Hz/60Hz
Cooling Water Pressure 1~2 bar
Cooling Water Temperature ≤28 °C
 

               * CEDRT: Clean, Empty, Dry, Room Temperature Furnace





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